Systems for supporting ceramic susceptors
US7022947B2 · kind B2 · utility
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8Claims
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Assignee
Inventors
Key dates
| Filing date | Jul 2, 2004 |
| Grant date | Apr 4, 2006 |
| Priority date | — |
| Expiry date | Jul 2, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/143
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A support structure for supporting a ceramic susceptor in a chamber is provided. The support structure includes a supporting portion joined with a back face of the ceramic susceptor. The supporting portion includes an inner space that is separated from the atmosphere of the chamber. A cooling system is provided below the supporting portion 6. At least one thermal control portion is provided between the cooling system and the supporting portion for reducing thermal conduction from the susceptor to the cooling system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.