Hideyoshi Tsuruta
29Patents
11h-index
21Co-inventors
75Inventor score
Filing activity: Jan 24, 1996 → Mar 14, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6608745B2 | Electrostatic chunks | Electricity | 464 | Expired |
| US6057513A | Joint structure of metal member and ceramic member and method of producing the same | Emerging Cross-Sectional Technologies | 84 | Expired |
| US5817406A | Ceramic susceptor with embedded metal electrode and brazing material connection | Emerging Cross-Sectional Technologies | 36 | Expired |
| US5794838A | Ceramics joined body and method of joining ceramics | Chemistry; Metallurgy | 31 | Expired |
| US7582184B2 | Plasma processing member | Electricity | 20 | Expired |
| US6617514B1 | Ceramics joint structure and method of producing the same | Electricity | 18 | Expired |
| US7189946B2 | Substrate heating device | Electricity | 16 | Expired |
| US7247819B2 | Substrate heating apparatus | Electricity | 12 | Expired |
| US7042697B2 | Electrostatic chucks and electrostatically attracting structures | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7044399B2 | Heating systems | Chemistry; Metallurgy | 11 | Expired |
| US5995357A | Ceramic member-electric power supply connector coupling structure | Electricity | 11 | Expired |
| US6800576B2 | Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6225606A | Ceramic heater | Electricity | 10 | Expired |
| US6785115B2 | Electrostatic chuck and substrate processing apparatus | Emerging Cross-Sectional Technologies | 8 | Expired |
| US7060945B2 | Substrate heater and fabrication method for the same | Electricity | 6 | Expired |
| US7525071B2 | Power-supplying member and heating apparatus using the same | Electricity | 6 | Active |
| US7763831B2 | Heating device | Electricity | 4 | Active |
| US6728091B2 | Electrostatic adsorption device | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7403386B2 | Electrostatic chuck | Electricity | 3 | Active |
| US7247818B2 | Substrate heating apparatus and manufacturing method for the same | Electricity | 3 | Expired |
| US7679034B2 | Power-supplying member and heating apparatus using the same | Electricity | 2 | Active |
| US7126093B2 | Heating systems | Electricity | 2 | Expired |
| US6636413B2 | Electrostatic chucks and process for producing the same | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7576967B2 | Electrostatic chuck | Electricity | 1 | Active |
| US10037910B2 | Wafer holder and method for manufacturing the same | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.