Dynamically adjustable probe tips
US7022976B1 · kind B1 · utility
100Cited by
14References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2003 |
| Grant date | Apr 4, 2006 |
| Priority date | — |
| Expiry date | Oct 26, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various probe systems and probes are provided. In one aspect, a probe is provided that includes a base and a first member coupled to the base. The first member has a first tip for probing a circuit device. A first actuator is coupled to the first member for moving the first member relative to the base. Electrical and/or topographical probing is possible.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.