Patent · US Expired

Particle-optical arrangements and particle-optical systems

US7022987B2 · kind B2 · utility

5Cited by

20References

43Claims

0Family size

Assignee

Carl Zeiss NIS GmbH · DE

Inventors

Dirk Preikszas · Oberkochen, DE
Michael Steigerwald · Aalen, DE

Key dates

Filing date	Aug 6, 2003
Grant date	Apr 4, 2006
Priority date	—
Expiry date	Aug 6, 2023

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3175
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

There are disclosed particle-optical beam splitters providing at least three beam-manipulating regions having magnetic fields of different field strengths provided therein for at least one particle beam passing the beam splitter. The beam splitter is, in first order, free of dispersion, astigmatism and distortion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.