Patent · US Expired

Full swath analysis

US7024339B1 · kind B1 · utility

9Cited by
0References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 18, 2004
Grant dateApr 4, 2006
Priority date
Expiry dateOct 18, 2024

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06T2207/30148
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates image data. Process nodes are coupled to the first network, and processes the data to produce reports. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the anomaly report. A second network receives the anomaly reports from the process nodes. A job manager is coupled to the second network, and receives the anomaly reports from the process nodes and sends information to the process nodes to coordinate the processing of the data in the process nodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.