Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
US7025664B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2004 |
| Grant date | Apr 11, 2006 |
| Priority date | — |
| Expiry date | Apr 21, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B49/16
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for planarizing a work piece includes an easily assembled work carrier. The carrier includes a carrier insert having a work piece bladder clamped to a carrier backing plate with a plurality of clamps to form a plurality of web plenums. The outer edge of the bladder is supported by a rib that is coupled to a carrier plenum. By adjusting the pressure in the carrier plenum, the pressure exerted on the edge of a work piece during a planarization operation can be adjusted. The carrier also includes a floating wear ring that surrounds the work piece bladder and a work piece mounted on that bladder. By adjusting the force exerted by the wear ring on a polishing pad, independently of the pressure exerted by the rib at the edge of the bladder, the material removal rate near the edge of the work piece can be controlled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.