Stephen C. Schultz
22Patents
11h-index
22Co-inventors
71Inventor score
Filing activity: Dec 20, 1993 → Oct 27, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5456627A | Conditioner for a polishing pad and method therefor | Performing Operations; Transporting | 166 | Expired |
| US5643061A | Pneumatic polishing head for CMP apparatus | Performing Operations; Transporting | 164 | Expired |
| US6390905B1 | Workpiece carrier with adjustable pressure zones and barriers | Performing Operations; Transporting | 103 | Expired |
| US6659850B2 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Performing Operations; Transporting | 75 | Expired |
| US7140956B1 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Performing Operations; Transporting | 58 | Expired |
| US6612903B2 | Workpiece carrier with adjustable pressure zones and barriers | Performing Operations; Transporting | 25 | Expired |
| US7402098B2 | Carrier head for workpiece planarization/polishing | Performing Operations; Transporting | 25 | Active |
| US6184139A | Oscillating orbital polisher and method | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6447379B1 | Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor | Performing Operations; Transporting | 23 | Expired |
| US6932671B1 | Method for controlling a chemical mechanical polishing (CMP) operation | Performing Operations; Transporting | 17 | Expired |
| US6540592B1 | Carrier head with reduced moment wear ring | Performing Operations; Transporting | 13 | Expired |
| US6500055B1 | Oscillating orbital polisher and method | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6758939B2 | Laminated wear ring | Performing Operations; Transporting | 11 | Expired |
| US6599175B2 | Apparatus for distributing a fluid through a polishing pad | Performing Operations; Transporting | 9 | Expired |
| US6878039B2 | Polishing pad window for a chemical-mechanical polishing tool | Performing Operations; Transporting | 8 | Expired |
| US7025664B2 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Performing Operations; Transporting | 7 | Expired |
| US6336853B1 | Carrier having pistons for distributing a pressing force on the back surface of a workpiece | Performing Operations; Transporting | 6 | Expired |
| US6790123B2 | Method for processing a work piece in a multi-zonal processing apparatus | Performing Operations; Transporting | 3 | Expired |
| US7335092B1 | Carrier head for workpiece planarization/polishing | Performing Operations; Transporting | 2 | Active |
| US7040957B2 | Platen and manifold for polishing workpieces | Performing Operations; Transporting | 2 | Expired |
| US6568991B2 | Method and apparatus for sensing a wafer in a carrier | Electricity | 2 | Expired |
| US7014541B2 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Performing Operations; Transporting | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.