Time of flight electron detector
US7030375B1 · kind B1 · utility
6Cited by
2References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 29, 2004 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | May 18, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/446
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods and apparatus for determining the material composition of a semiconductor device at an area of interest are described. An electron time-of-flight spectrometer is used within a semiconductor inspection system. The spectrometer is placed on the opposite side of an objective lens from the area of interest. In one embodiment, the electron time-of-flight spectrometer is an electron drift tube. A computing module produces an electron emission spectrum for the materials at the area of interest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.