Patent · US Expired

Modular substrate measurement system

US7030401B2 · kind B2 · utility

0Cited by

10References

11Claims

0Family size

Assignees

Nanophotonics Co., Ltd. · DE
Recif SA · FR

Inventors

Michael Abraham · Mainz, DE
Ivo Raaijmakers · Bilthoven, NL
Alain Gaudon · Colomiers, FR
Pierre Astegno · Castelginest, FR

Key dates

Filing date	Apr 12, 2001
Grant date	Apr 18, 2006
Priority date	—
Expiry date	Mar 18, 2023

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/53187
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A substrate measurement system including a measurement chamber and a substrate handling chamber possessing a substrate transfer and a substrate container interface arranged to receive a substrate to container. The handling chamber contains a first interface to connect the measurement chamber and the measurement chamber contains a second interface to connect the handling chamber. The transfer means is arranged to transfer substrates between the container and the measurement chamber through the handling chamber, in which system a second measurement chamber is provided, having the same second interface as the first measurement chamber to replace latter chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.