Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratings
US7031894B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2002 |
| Grant date | Apr 18, 2006 |
| Priority date | — |
| Expiry date | Jul 28, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/4788
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A library of simulated-diffraction signals and hypothetical profiles of a periodic grating can be generated by generating diffraction calculations for a plurality of blocks of hypothetical layers. A diffraction calculation for a block of hypothetical layers characterizes, in part, the behavior of a diffraction beam in the block of hypothetical layers. Each block of hypothetical layers includes two or more hypothetical layers, and each hypothetical layer characterizes a layer within a hypothetical profile. The diffraction calculations for the blocks of hypothetical layers are stored prior to generating the library. The simulated-diffraction signals to be stored in the library are then generated based on the stored diffraction calculations for the blocks of hypothetical layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.