Method of synthesising carbon nano tubes

US7033647B2 · kind B2 · utility

Assignees

• Electrovac, Fabrikation Elektrotechnischer Spezialartikel Gesellschraft m.b.H. · AT
• IMS-Ionen Mikrofabrikationas Systeme · AT

Inventors

• Xinhe Tang · Wien, AT
• Klaus Mauthner · Wien, AT
• Ernst Hammel · Wien, AT
• Hans Loschner · Wien, AT
• Elmar Platzgummer · Wien, AT
• Gerhard Stengl · Villach, AT

Key dates

• Filing date: Nov 20, 2002
• Grant date: Apr 25, 2006
• Expiry date: Feb 18, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S427/102
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Method of synthesizing carbon nano tubes (CNTs) on a catalyst layer formed on a support member, by catalytic deposition of carbon from a gaseous phase, whereby an ion beam is used prior to, during, and/or after formation of the carbon nano tubes for modifying the physical, chemical, and/or conductive properties of the carbon nanotubes.