Method of improving the performance of microstructures
US7034982B2 · kind B2 · utility
3Cited by
10References
82Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 13, 2004 |
| Grant date | Apr 25, 2006 |
| Priority date | — |
| Expiry date | Aug 12, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A plastically deformable element of a microelectromechanical device is strained so as to improve the lifetime of the microelectromechanical device. The element of the device can be strained by deforming the element into a deformed state and holding the element at the deformed state for a particular time period so as to acquire an amount of plastic deformation. The operation states of the device are calibrated according to the states before straining and the acquired plastic deformation. After then, the device is operated in the calibrated states.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.