Asymmetric spatial light modulator in a package
US7034985B1 · kind B1 · utility
4Cited by
12References
71Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2004 |
| Grant date | Apr 25, 2006 |
| Priority date | — |
| Expiry date | Dec 10, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed herein is a micromirror package having a micromirror being attached to a supporting surface of a package substrate, and sealed between the package substrate and a package cover, whereas the micromirror array is placed offset the center of the supporting surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.