Method of connecting a multiplicity of optical elements to a basic body

US7034998B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Frank Melzer · Utzmemmingen, DE
• Ulrich Bingel · Michelfeld, DE

Key dates

• Filing date: Jun 21, 2001
• Grant date: Apr 25, 2006
• Expiry date: Jun 21, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S359/90
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In a method of connecting a multiplicity of optical elements (9) to a basic body (8), in particular for producing a faceted mirror (1), for example for beam mixing and field imaging for an EUV lighting system, the individual optical elements (9) are positioned on the basic body (8, 14) and subsequently connected to one another by an galvanoplastic process. Alternatively, the multiplicity of optical elements are aligned on an auxiliary structure (11) and the optical elements (9) are subsequently made to grow up galvanoplastically on their rear sides, forming a supporting structure (14) as the basic body.