Very high sensitivity magnetic sensor
US7038285B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2000 |
| Grant date | May 2, 2006 |
| Priority date | — |
| Expiry date | Sep 19, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/19
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetic sensor includes a thin deformable membrane made of a conductive material forming a first plate of a capacitor which conducts an electric current therethrough. A second capacitor plate of the capacitor includes a doped region of a semiconductor substrate. A layer of a gaseous dielectric separates the two plates. The membrane deforms due to the effect of the Lorentz force generated by a magnetic field lying in the plane of the membrane and perpendicular to the lines of current being conducted therethrough. In addition, a process for fabricating this magnetic sensor is also provided as well as a device for measuring a magnetic field using the magnetic sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.