Test apparatus with loading device

US7038441B2 · kind B2 · utility

Assignee

• SUSS MicroTec Test Systems GmbH · DE

Inventors

• Karsten Stoll · Wilthen, DE
• Stefan Kreissig · Drebach, DE
• Alf Wachtveitl · Dresden, DE
• Michael Teich · Mannheim, DE
• Stefan Schneidewind · Sankt Goar, DE
• Claus Dietrich · Sacka, DE
• Jorg Kiesewetter · Thiendorf, DE
• Dietmar Runge · Großerkmannsdorf, DE

Key dates

• Filing date: Oct 2, 2003
• Grant date: May 2, 2006
• Expiry date: May 9, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2831
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention, which relates to a test apparatus with loading device which has a chuck, which is provided with a bearing surface for a test substrate and with a chuck drive, by means of which the chuck can be displaced with a working area, and which has a receiving means for receiving test substrates, which can be displaced from a working area of the chuck to a receiving position outside the working area, is based on the object of increasing the accuracy of the movement of the chuck. Moreover, in the case of test apparatus with a controlled atmosphere, a further object is to prevent the chuck from being exposed to the open-air atmosphere. This is achieved by virtue of the fact that a carriage, which can be displaced between a position close to the chuck, in which the chuck is located in a position inside the working area, and the receiving position, is provided, which carriage is provided with a holder, in which the test substrate can be at least indirectly inserted in such a way that the test substrate, when the carriage is in the position close to the chuck, is located above the chuck. The holder and the chuck can move vertically relative to one another when the carriage is in th…