Providing fluorocarbon layers on conductive electrodes in making electronic devices such as OLED devices
US7041608B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2004 |
| Grant date | May 9, 2006 |
| Priority date | — |
| Expiry date | Feb 6, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0212
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of making an electronic device in which a conductive electrode has been formed over a substrate including using a liquid to clean the conductive electrode, heating in a processing station the conductive electrode to a temperature which dries the conductive electrode and thereby removes residual cleaning liquid applied during the cleaning step, and providing an oxidizing plasma in the processing station to modify the properties of the conductive electrode. The method also includes producing a fluorocarbon plasma in the processing station to form a fluorocarbon layer over the modified conductive electrode, and further processing the structure to produce the electronic device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.