Method for making tapered opening for programmable resistance memory element
US7045383B2 · kind B2 · utility
15Cited by
2References
41Claims
0Family size
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Inventors
Key dates
| Filing date | Mar 24, 2003 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Mar 24, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N70/8828
Abstract
A method for making a tapered opening. The defined tapered opening is useful for the fabrication of programmable resistance memory elements. The programmable resistance memory material may be a chalcogenide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.