Charged particle beam apparatus and method for operating the same

US7045781B2 · kind B2 · utility

Assignee

• ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

• Pavel Adamec · Haar, DE
• Ralf Degenhardt · Landsham, DE
• Hans-Peter Feuerbaum · Hersbruck, DE
• Harry Munack · Heimstetten, DE
• Dieter Winkler · Munich, DE

Key dates

• Filing date: Jan 16, 2004
• Grant date: May 16, 2006
• Expiry date: Jan 16, 2024

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2857
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam to a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.