Column simultaneously focusing a partilce beam and an optical beam
US7045791B2 · kind B2 · utility
19Cited by
60References
20Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Mar 19, 2001 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Apr 28, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention concerns a column for producing a focused particle beam comprising: a device (100) focusing particles including an output electrode (130) with an output hole (131) for allowing through a particle beam (A); an optical focusing device (200) for simultaneously focusing an optical beam (F) including an output aperture (230). The invention is characterized in that said output aperture (230) is transparent to the optical beam (F), while said output electrode (130) is formed by a metallic insert (130) maintained in said aperture (230) and bored with a central hole (131) forming said output orifice.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.