Multi-grid ion beam source for generating a highly collimated ion beam
US7045793B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 14, 2004 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Jun 14, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/024
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A multi-grid ion beam source has an extraction grid, an acceleration grid, a focus grid, and a shield grid to produce a highly collimated ion beam. A five grid ion beam source is also disclosed having two shield grids. The extraction grid has a high positive potential and covers a plasma chamber containing plasma. The acceleration grid has a non-positive potential. The focus grid is positioned between the acceleration grid and the shield grid. The combination of the extraction grid and the acceleration grid extracts ions from the plasma. The focus grid acts to change momentum of the ions exiting the acceleration grid, focusing the ions into a more collimated ion beam than previous approaches. In one embodiment, the focus grid has a large positive potential. In another embodiment, the focus grid has a large negative potential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.