Semiconductor device using MEMS switch
US7045843B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2004 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Mar 1, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2001/0063
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed herein is a latchable MEMS switch device capable of retaining its ON or OFF state even after the external power source is turned off. It is unnecessary not only to introduce novel materials such as magnetic material but also to form complicated structures. At least one of the cantilever and pull-down electrode of a cold switch is connected to a second MEMS switch. A capacitor between the cantilever and pull-down electrode of the cold switch is charged by the second MEMS switch. Thereafter since the cold switch is isolated in the device, the charge remains stored. Therefore, the cold switch can remain in the ON state since the charge continues to create electrostatic attraction between the cantilever and the pull-down electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.