Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system
US7047093B2 · kind B2 · utility
11Cited by
6References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2003 |
| Grant date | May 16, 2006 |
| Priority date | — |
| Expiry date | Oct 22, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/80
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A sample processing apparatus having a main unit for processing a sample, a recorder for recording information of an operation in the main unit as predetermined data, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on the main unit, and a display unit for displaying each of the data corresponding to outputs of the sensors simultaneously.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.