Electrode in a discharge produced plasma extreme ultraviolet source
US7049614B2 · kind B2 · utility
6Cited by
10References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 10, 2003 |
| Grant date | May 23, 2006 |
| Priority date | — |
| Expiry date | Nov 30, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70033
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
An electrode in an extreme ultraviolet (EUV) source of an EUV lithography tool. The extreme ultraviolet source may be operable to produce a plasma which emits extreme ultraviolet radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.