Method and apparatus for optical probing of integrated circuit operation
US7049632B2 · kind B2 · utility
2Cited by
5References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 24, 2002 |
| Grant date | May 23, 2006 |
| Priority date | — |
| Expiry date | Mar 24, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Optical transducers disposed on an integrated circuit correspond to test points thereon. The state of optical transducers perceived by an optical sensor is correlated to test points. Alignment of the optical sensor relative to the optical transducers is accomplished electronically or mechanically.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.