DUV-capable microscope objective with parfocal IR focus

US7050223B1 · kind B1 · utility

Assignee

• Leica Microsystems Semiconductor GmbH · DE

Inventor

• Gerhard Hoppen · Wetzlar, DE

Key dates

• Filing date: Jun 21, 2000
• Grant date: May 23, 2006
• Expiry date: Jul 15, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/02
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A DUV-capable dry objective for microscopes comprises lens groups made of quartz glass, fluorite, and in some cases also lithium fluoride. It possesses a DUV focus for a DUV wavelength region λDUV±Δλ, where Δλ=8 nm, and additionally a parfocal IR focus for an IR wavelength λIR, where 760 nm≧λIR≧920 nm. For that purpose, the penultimate element is of concave configuration on both sides, and its object-side outer radius is much smaller than its image-side outer radius. The DUV objective is IR autofocus-capable.