Adjusting a sampling protocol in an adaptive control process
US7050879B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2003 |
| Grant date | May 23, 2006 |
| Priority date | — |
| Expiry date | May 25, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06Q10/00
- WIPO fieldIT methods for management
- WIPO sectorElectrical engineering
Abstract
A method and an apparatus are provided for adjusting a sampling protocol in an adaptive control process. The method comprises determining a performance value based on a measurement associated with at least one or more previously processed workpieces, adjusting a sampling protocol for one or more processed workpieces based on the determined performance value, and measuring the one or more processed workpieces according to the sampling protocol to provide one or more measurements. The method further comprises adjusting at least one of a process model and a control parameter based on at least a portion of the one or more measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.