Annular receptacle for a rotating carrier
US7052577B2 · kind B2 · utility
2Cited by
6References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 5, 2002 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Sep 6, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An annular receptacle is described, particularly for a rotating carrier for receiving a disk-shaped object such as a semiconductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.