Scan data collection for better overall data accuracy
US7053369B1 · kind B1 · utility
2Cited by
147References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2002 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Aug 24, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scan data collection operation includes performing a scanning operation using a scan path that includes a directional component that is additional to a data collection directional component. The collected scan data is mapped to another set of locations, thus allowing for detection of surface features using fewer scans.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.