Patent · US Expired

Surrounding structure for a probe card

US7053638B2 · kind B2 · utility

3Cited by
5References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 8, 2004
Grant dateMay 30, 2006
Priority date
Expiry dateNov 8, 2024

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R1/07342
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A surrounding structure of a probe card is described, and particularly an isolator unit, which is formed by filling in a wire leading region with epoxy material to substitute for an originally clear portion, so as to improve high impedance characteristics of the cross-over portion by using the resultant parasitic capacitance effect, and improve the compensation for the purpose of impedance matching. Additionally, the energy loss is reduced and the application frequency range is widened.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.