Differential numerical aperture methods
US7053991B2 · kind B2 · utility
72Cited by
30References
19Claims
0Family size
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Key dates
| Filing date | Jun 10, 2004 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Jun 10, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/214
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods for differential numerical aperture analysis of samples, utilizing angle-of-incidence measurements resulting from variable illumination or observation numerical apertures, or both. Metrology applications are provided, and more particularly including scatterometer, ellipsometer and similar analysis methods, including bi-directional reflectance or transmission distribution function measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.