Patent assignee · US · COMPANY

Accent Optical Technologies, Inc.

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13Patents
5Active
13Granted
38Portfolio score

Filing activity: Sep 4, 2001 → Jul 6, 2007 · 5 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6856408B2 Line profile asymmetry measurement using scatterometry Physics 97 Expired
US6606152B2 Determination of center of focus by diffraction signature analysis Physics 80 Expired
US7053991B2 Differential numerical aperture methods Physics 72 Expired
US6429930B1 Determination of center of focus by diffraction signature analysis Physics 52 Expired
US7474401B2 Multi-layer alignment and overlay target and measurement method Physics 24 Active
US6750968B2 Differential numerical aperture methods and device Physics 23 Expired
US7110099B2 Determination of center of focus by cross-section analysis Physics 12 Expired
US7119893B2 Determination of center of focus by parameter variability analysis Physics 12 Expired
US6728663B2 Structure identification using scattering signatures Physics 11 Expired
US7800824B2 Method for designing gratings Emerging Cross-Sectional Technologies 1 Active
US7619753B2 Method for measuring dimensions and optical system using the same Physics 1 Active
US7355713B2 Method for inspecting a grating biochip Physics 0 Active
US7433060B2 Method for correlating a structural parameter of a plurality of gratings and method for determining a structural parameter value of an unknown grating using the same Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.