Accent Optical Technologies, Inc.
🏢 View company profile →13Patents
5Active
13Granted
38Portfolio score
Filing activity: Sep 4, 2001 → Jul 6, 2007 · 5 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6856408B2 | Line profile asymmetry measurement using scatterometry | Physics | 97 | Expired |
| US6606152B2 | Determination of center of focus by diffraction signature analysis | Physics | 80 | Expired |
| US7053991B2 | Differential numerical aperture methods | Physics | 72 | Expired |
| US6429930B1 | Determination of center of focus by diffraction signature analysis | Physics | 52 | Expired |
| US7474401B2 | Multi-layer alignment and overlay target and measurement method | Physics | 24 | Active |
| US6750968B2 | Differential numerical aperture methods and device | Physics | 23 | Expired |
| US7110099B2 | Determination of center of focus by cross-section analysis | Physics | 12 | Expired |
| US7119893B2 | Determination of center of focus by parameter variability analysis | Physics | 12 | Expired |
| US6728663B2 | Structure identification using scattering signatures | Physics | 11 | Expired |
| US7800824B2 | Method for designing gratings | Emerging Cross-Sectional Technologies | 1 | Active |
| US7619753B2 | Method for measuring dimensions and optical system using the same | Physics | 1 | Active |
| US7355713B2 | Method for inspecting a grating biochip | Physics | 0 | Active |
| US7433060B2 | Method for correlating a structural parameter of a plurality of gratings and method for determining a structural parameter value of an unknown grating using the same | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.