Mireau interference objective lens
US7054071B2 · kind B2 · utility
2Cited by
5References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 8, 2004 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Aug 6, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0068
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A Mireau interference microscope is corrected for spherical and other aberrations induced by the beamsplitter and mirror support windows by incorporating a cover glass correcting-objective lens. The support windows for the beamsplitter and mirror have a combined thickness within the adjustment range of the cover glass correcting-objective lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.