Patent · US Expired

Micromechanical pressure sensor

US7055392B2 · kind B2 · utility

5Cited by

8References

9Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Joerg Muchow · Reutlingen, DE
Hubert Benzel · Neckartenzlingen, DE
Roland Guenschel · Reutlingen, DE

Key dates

Filing date	Jun 30, 2004
Grant date	Jun 6, 2006
Priority date	—
Expiry date	Aug 23, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG01L9/0054
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical pressure sensor which is made up of at least one first component element and a second component element bordering on the first component element. In this context, the first component element includes at least one diaphragm and one cavity. The cavity is arranged or structured so that the medium to be measured gains access to the diaphragm through the cavity. In addition, in the second component element an opening is provided which guides the medium to be measured to the cavity. At least a part of the cavity represents an extension, without a transition, of the opening in the second component.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.