Forming a plurality of thin-film devices using imprint lithography
US7056834B2 · kind B2 · utility
26Cited by
0References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2004 |
| Grant date | Jun 6, 2006 |
| Priority date | — |
| Expiry date | May 6, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K77/111
Abstract
An aspect of the present invention is a method for forming a plurality of thin-film devices. The method includes providing a flexible substrate and utilizing a self-aligned imprint lithography (SAIL) process to form the plurality of thin-film devices on the flexible substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.