Method and apparatus for assembling an array of micro-devices
US7057245B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2004 |
| Grant date | Jun 6, 2006 |
| Priority date | — |
| Expiry date | Jul 16, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3586
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.