Innovative Micro Technology
🏢 View company profile →82Patents
69Active
82Granted
53Portfolio score
Filing activity: Jan 17, 2001 → Mar 15, 2021 · 33 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6838056B2 | Method and apparatus for sorting biological cells with a MEMS device | Emerging Cross-Sectional Technologies | 67 | Expired |
| US7264972B2 | Method and apparatus for sorting biological cells with a MEMS device | Emerging Cross-Sectional Technologies | 57 | Expired |
| US7220594B2 | Method and apparatus for sorting particles with a MEMS device | Emerging Cross-Sectional Technologies | 57 | Expired |
| US7229838B2 | MEMS actuator and method of manufacture for MEMS particle sorting device | Emerging Cross-Sectional Technologies | 34 | Expired |
| US7528691B2 | Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture | Electricity | 21 | Active |
| US7972683B2 | Wafer bonding material with embedded conductive particles | Emerging Cross-Sectional Technologies | 21 | Active |
| US8871500B2 | MEMS particle sorting actuator and method of manufacturing | Performing Operations; Transporting | 20 | Active |
| US7210352B2 | MEMS teeter-totter apparatus with curved beam and method of manufacture | Physics | 18 | Expired |
| US7233048B2 | MEMS device trench plating process and apparatus for through hole vias | Electricity | 12 | Expired |
| US7675162B2 | Interconnect structure using through wafer vias and method of fabrication | Performing Operations; Transporting | 12 | Active |
| US7864006B2 | MEMS plate switch and method of manufacture | Electricity | 12 | Active |
| US7893798B2 | Dual substrate MEMS plate switch and method of manufacture | Emerging Cross-Sectional Technologies | 12 | Active |
| US7569926B2 | Wafer level hermetic bond using metal alloy with raised feature | Electricity | 10 | Active |
| US6812061B1 | Method and apparatus for assembling an array of micro-devices | Physics | 10 | Expired |
| US7548145B2 | Hysteretic MEMS thermal device and method of manufacture | Emerging Cross-Sectional Technologies | 9 | Active |
| US7141080B2 | Method and apparatus for assembling an array of micro-devices | Physics | 9 | Expired |
| US6831380B2 | Low inertia latching microactuator | Emerging Cross-Sectional Technologies | 9 | Expired |
| US7057245B2 | Method and apparatus for assembling an array of micro-devices | Physics | 9 | Expired |
| US8466760B2 | Configurable power supply using MEMS switch | Emerging Cross-Sectional Technologies | 8 | Active |
| US8993311B2 | Multi-stage cartridge for MEMS particle storing system | Physics | 8 | Active |
| US7785913B2 | System and method for forming moveable features on a composite substrate | Performing Operations; Transporting | 7 | Active |
| US6351201B1 | Microelectromechanical switch with braking algorithm | Electricity | 7 | Expired |
| US7462931B2 | Indented structure for encapsulated devices and method of manufacture | Electricity | 7 | Active |
| US7688167B2 | Contact electrode for microdevices and etch method of manufacture | Electricity | 6 | Active |
| US8822207B2 | Cartridge for MEMS particle sorting system | Physics | 6 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.