Shielded probe for testing a device under test

US7057404B2 · kind B2 · utility

Assignee

• Sharp Laboratories of America, Inc. · US

Inventors

• K. Reed Gleason · Portland, US
• Tim Lesher · Portland, US
• Mike Andrews · Cornelius, US
• John Martin · Portland, US

Key dates

• Filing date: May 23, 2003
• Grant date: Jun 6, 2006
• Expiry date: Nov 18, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R1/06738
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. The probe measurement system preferably includes a probe having a conductive path between the first and second sides of a substrate and a probe contact electrically connected to the conductive path.