Common optical-path testing of high-numerical-aperture wavefronts
US7057737B2 · kind B2 · utility
17Cited by
18References
47Claims
0Family size
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Key dates
| Filing date | Aug 29, 2003 |
| Grant date | Jun 6, 2006 |
| Priority date | — |
| Expiry date | Oct 5, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A polarizing point-diffraction plate is used to produce common-path test and reference wavefronts with mutually orthogonal polarizations from an input wavefront. The common-path test and reference wavefronts are collimated, phase shifted and interfered, and the resulting interferograms are imaged on a detector. The interference patterns are then processed using conventional algorithms to characterize the input light wavefront.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.