Micromirror for MEMS device
US7057794B2 · kind B2 · utility
5Cited by
12References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 19, 2004 |
| Grant date | Jun 6, 2006 |
| Priority date | — |
| Expiry date | Jul 1, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromirror which includes a substrate, a reflective layer comprising pure aluminum overlying the substrate and a protective layer comprising titanium nitride overlying the reflective layer is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.