Unitary slot valve actuator with dual valves
US7059583B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 10, 2005 |
| Grant date | Jun 13, 2006 |
| Priority date | — |
| Expiry date | Feb 10, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K51/02
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as process and transport modules. Separate valves are provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The unitary actuator allows access to an open valve for servicing the open valve by way of a centering mechanism that holds the valves in an open, but not vertically-spaced, position relative to the slots. The open valves are easily reached by a service worker. A separate motor moves the unitary actuator and the valves down from the open position and away from the slots to expose seal surfaces around the slots for cleaning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.