Patent · US Expired

Method of supercritical processing of a workpiece

US7060422B2 · kind B2 · utility

14Cited by

295References

21Claims

0Family size

Assignee

TOKYO ELECTRON LIMITED · JP

Inventors

Maximilian A. Biberger · Scottsdale, US
Frederick P. Layman · Carefree, US
Thomas Sutton · Fremont, US

Key dates

Filing date	Jan 15, 2003
Grant date	Jun 13, 2006
Priority date	—
Expiry date	Mar 20, 2023

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/135
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An apparatus for supercritical processing and non-supercritical processing of a workpiece comprises a transfer module, a supercritical processing module, a non-supercritical processing module, and a robot. The transfer module includes an entrance. The supercritical processing module and the non-supercritical processing module are coupled to the transfer module. The robot is preferably located within the transfer module. In operation, the robot transfers a workpiece from the entrance of the transfer module to the supercritical processing module. After supercritical processing, the robot then transfers workpiece from the supercritical processing module to the non-supercritical processing module. After the non-supercritical processing, the robot returns the workpiece to the entrance of the transfer module. Alternatively, the non-supercritical processing is performed before the supercritical processing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.