Optical scatterometry of asymmetric lines and structures
US7061627B2 · kind B2 · utility
85Cited by
22References
8Claims
0Family size
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Key dates
| Filing date | Mar 11, 2003 |
| Grant date | Jun 13, 2006 |
| Priority date | — |
| Expiry date | Apr 15, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70633
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for analyzing asymmetric structures (including isolated and periodic structures) includes a split detector for use in a broadband spectrometer. The split has detector has separate right and left halves. By independently measuring and comparing the right and left scattered rays, information about asymmetries can be determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.