Patent · US Expired

Illumination system with a plurality of light sources

US7071476B2 · kind B2 · utility

8Cited by

52References

43Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Dirk Rothweiler · Phra Pradaeng, TH
Jorg Schultz · Aalen, DE

Key dates

Filing date	May 5, 2003
Grant date	Jul 4, 2006
Priority date	—
Expiry date	Jan 2, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG21K1/06
WIPO fieldOptics
WIPO sectorInstruments

Abstract

There is provided an illumination system for EUV-wavelengths. The illumination system includes a plurality of EUV-light sources and an optical unit combining the plurality of EUV-light sources.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.