Methods and apparatus for pressure compensation in a mass flow controller
US7073392B2 · kind B2 · utility
54Cited by
72References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2003 |
| Grant date | Jul 11, 2006 |
| Priority date | — |
| Expiry date | Sep 27, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7762
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.