Patent · US Expired

Sensor for measuring pressure in a sealed volume

US7073400B2 · kind B2 · utility

2Cited by
7References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 9, 2003
Grant dateJul 11, 2006
Priority date
Expiry dateSep 9, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01L1/02
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A sensor for measuring a force is provided, which sensor includes a first sealed volume, a second sealed volume, a pressure diaphragm and a force diaphragm. The pressure diaphragm has a first side and a second side, with a pressure of the first sealed volume acting on the first side, and a pressure of the second sealed volume acting on the second side. The force diaphragm is exposed to a force, and the pressure of the first volume is dependent on the force acting on the force diaphragm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.