Sensor for measuring pressure in a sealed volume
US7073400B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2003 |
| Grant date | Jul 11, 2006 |
| Priority date | — |
| Expiry date | Sep 9, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor for measuring a force is provided, which sensor includes a first sealed volume, a second sealed volume, a pressure diaphragm and a force diaphragm. The pressure diaphragm has a first side and a second side, with a pressure of the first sealed volume acting on the first side, and a pressure of the second sealed volume acting on the second side. The force diaphragm is exposed to a force, and the pressure of the first volume is dependent on the force acting on the force diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.