Sorting/storage device for wafers and method for handling thereof
US7077614B1 · kind B1 · utility
379Cited by
24References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 1999 |
| Grant date | Jul 18, 2006 |
| Priority date | — |
| Expiry date | Feb 9, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67769
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Sorting/storage device for wafers. A sorting device is provided in which at least two cassettes containing wafers may be present and the wafers are moved from one cassette to the other cassette or vice versa. If appropriate, a measuring station may be present in the sorting device. In the immediate vicinity of the sorting device, the cassettes are stored in a magazine which is designed for this purpose and the cassettes are moved using a handling device for cassettes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.