System and method of wavefront sensing for determining a location of focal spot
US7078665B2 · kind B2 · utility
8Cited by
1References
1Claims
0Family size
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Key dates
| Filing date | Jul 9, 2003 |
| Grant date | Jul 18, 2006 |
| Priority date | — |
| Expiry date | Aug 15, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J9/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method of wavefront sensing with a Shack-Hartmann wavefront sensor precisely locates focal spots on a detector array, and determines the location of the lenslet array with respect to the detector array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.