Catadioptric optical system and exposure apparatus equipped with the same
US7079314B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2000 |
| Grant date | Jul 18, 2006 |
| Priority date | — |
| Expiry date | Jul 12, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70358
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A catadioptric optical system comprising a first imaging optical system for forming an intermediate image of a first plane surface, a second imaging optical system for forming a final image of the first plane surface onto a second plane surface which is substantially parallel to the first plane surface, and a catadioptric type optical system disposed in the optical path from the first plane surface to the second plane surface and including a first reflecting surface which reflects light coming from through the first plane surface and a second reflecting surface for directing the light reflected by the first reflecting surface toward the second plane surface. At least one of the first and second reflecting surfaces is a concave reflecting surface. All of the optical elements of the catadioptric optical system are disposed on a single linear optical axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.