Bearing assembly, stage device using same, and exposure apparatus using same
US7084538B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 2, 2003 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Jan 18, 2024 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2322/39
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A stage base includes a magnetic body and has a slider guide surface defined by a groove. A portion of the slider that opposes the guide surface is provided with an air pad, whereby a hydrostatic bearing is formed. The slider is further provided with a pressurizing magnet for applying a magnetic attractive force between itself and the guide surface in a direction perpendicular to the guide surface. Displacement of the slider in a direction orthogonal to the travelling direction thereof is limited to a predetermined range using a magnetic attractive force, which is parallel to the guide surface, produced when at least a part of the pressurizing magnet deviates from the guide surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.